This diaphragm gauge equipped with a sapphire pressure sensor manufactured using MEMS processing technology achieves higher resistance to deposition.
- Higher resistance to deposition minimizes downtime.
- Heat resistance up to 250 °C for use with high-temperature process gases
- Compact body for a smaller footprint
Loader Packages, Drivers
Pressure Sensors, Vacuum Gauges
CAD data
Inquiries about control products