Pressure Sensors, Vacuum Gauges

Sapphire Capacitance Diaphragm Gauge Model V8C/V8S

Model No.
V8C, V8S
V8.jpg

This diaphragm gauge equipped with a sapphire pressure sensor manufactured using MEMS processing technology achieves higher resistance to deposition.

  • Higher resistance to deposition minimizes downtime.
  • Heat resistance up to 250 °C for use with high-temperature process gases
  • Compact body for a smaller footprint
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A-2-3-9_成膜装置
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A-2-3-9_エッチング装置
Semiconductor: etching equipment

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