Pressure Sensors, Vacuum Gauges

Sapphire Capacitance Diaphragm Gauge Model SPG5_/6_/7_

Model No.
SPG _ _
SPGALL

These capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high durability, reliability, and accuracy.

  • Stable zero point even in a stressful environment
  • Less equipment downtime
  • Instrument condition is easy to understand

Catalogs

3 items
[Catalog / English] Control Products for Instrumentation Selection Guide
Document No
CP-PC-1391E
Model No.
C1A,C1M,C25,C26,C35,C36,C7,NX,NX-SVG,YY,SPG,PTG,PGM,PG5,PU,ECM,ACT,AGVB,AGVM,VFR,AVP,SR,ARF
[Catalog / English] Sapphire Capacitance Diaphragm Gauge Model SPG5_ / 6_ / 7_
Document No
CP-PC-1572E
Model No.
SPG _ _
[Catalog / English] Higher quality by stabilizing production processes (Vacuum equipment)
Document No
CP-PC-9010-004E
Model No.
SPG_ _ 

Specification Sheets

3 items
[Spec Sheet / Chinese (Simplified)] Sapphire capacitance diaphragm gauge Model SPG _ _
Document No
CP-SS-1881C
Model No.
SPG _ _
[Spec Sheet / English] Sapphire capacitance diaphragm gauge Model SPG_ _
Document No
CP-SS-1881E
Model No.
SPG_ _
[Spec Sheet / Korean] Sapphire capacitance diaphragm gauge Model SPG _ _
Document No
CP-SS-1881K
Model No.
SPG_ _

User's Manuals

4 items
[Manual / English] User’s Manual for Smart Loader Package Model SLP-SP5 for Sapphire Capacitance Diaphragm Gauge Model SPG _ _
Document No
CP-UM-5499E
Model No.
SLP-SP5
[Manual / Chinese (Simplified)] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual (Chinese (Simplified))
Document No
CP-SP-1400C
Model No.
SPG_ _
[Manual / English] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual
Document No
CP-SP-1400E
Model No.
SPG_ _
[Manual / Korean] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual (Korean)
Document No
CP-SP-1400K
Model No.
SPG_ _

Loader Packages, Drivers

Pressure Sensors, Vacuum Gauges

Model SPG9 Sapphire Capacitance Diaphragm Gauge for EtherCAT
Free version
Model SPG_ _ Sapphire Capacitance Diaphragm Gauge
Upgrade
Download Various Configuration Files for Model SPG9 Sapphire Capacitance Diaphragm Gauge for EtherCAT
Configuration files, etc.

CAD data

Search for CAD data

Inquiries about control products

 

Inquiry form