Pressure Sensors, Vacuum Gauges

Sapphire Capacitance Diaphragm Gauge Model SPG5_/6_/7_

Model No.
SPG _ _
SPGALL

These capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high durability, reliability, and accuracy.

  • Stable zero point even in a stressful environment
  • Less equipment downtime
  • Instrument condition is easy to understand

Catalogs

3 items
[Catalog / English] Control Products for Instrumentation Selection Guide
Document No
CP-PC-1391E
Model No.
C1A,C1M,C25,C26,C35,C36,C7,NX,NX-SVG,YY,SPG,PTG,PGM,PG5,PU,ECM,ACT,AGVB,AGVM,VFR,AVP,SR,ARF
[Catalog / English] Sapphire Capacitance Diaphragm Gauge Model SPG5_ / 6_ / 7_
Document No
CP-PC-1572E
Model No.
SPG _ _
[Catalog / English] Higher quality by stabilizing production processes (Vacuum equipment)
Document No
CP-PC-9010-004E
Model No.
SPG_ _ 

Specification Sheets

3 items
[Spec Sheet / Chinese (Simplified)] Sapphire capacitance diaphragm gauge Model SPG _ _
Document No
CP-SS-1881C
Model No.
SPG _ _
[Spec Sheet / English] Sapphire capacitance diaphragm gauge Model SPG_ _
Document No
CP-SS-1881E
Model No.
SPG_ _
[Spec Sheet / Korean] Sapphire capacitance diaphragm gauge Model SPG _ _
Document No
CP-SS-1881K
Model No.
SPG_ _

User's Manuals

4 items
[Manual / Chinese (Simplified)] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual (Chinese (Simplified))
Document No
CP-SP-1400C
Model No.
SPG_ _
[Manual / English] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual
Document No
CP-SP-1400E
Model No.
SPG_ _
[Manual / Korean] Sapphire Capacitance Diaphragm Gauge Model SPG _ _ User's Manual (Korean)
Document No
CP-SP-1400K
Model No.
SPG_ _
[Manual / English] User’s Manual for Smart Loader Package Model SLP-SP5 for Sapphire Capacitance Diaphragm Gauge Model SPG _ _
Document No
CP-UM-5499E
Model No.
SLP-SP5

Loader Packages, Drivers

Pressure Sensors, Vacuum Gauges

Model SPG9 Sapphire Capacitance Diaphragm Gauge for EtherCAT
Free version
Model SPG_ _ Sapphire Capacitance Diaphragm Gauge
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Download Various Configuration Files for Model SPG9 Sapphire Capacitance Diaphragm Gauge for EtherCAT
Configuration files, etc.

CAD data

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