The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.
Control of suction flow rate in air volume samplers, gas detectors, etc.
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- Measures the mass flow rate intake of the pump without effects from temperature fluctuation or changes in atmospheric pressure.
- Operates on battery power on handheld equipment.
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Control or monitoring of supply flow rate for oxygen concentrators, etc.
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- Useful for control of oxygen flow rate from compressor, without effects from fluctuation in room temperature or altitude.
- Useful for replacing from a float meter.
- Can be used for oxygen with a concentration up to 95 % that is supplied at up to 50 kPa.
- The gas-contacting parts of this product are not degreased for use with oxygen.
Monitoring of purge rate or cooling flow rate for wire bonders, etc.
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- Measures flow rate of air supplied to eliminate heat haze.
- Measures flow rate of nitrogen supplied to prevent oxidation.
- Useful for replacing from a float meter or pressure gauge.
Pick-up and placement detection of miniature electrical or optical devices.
- Can be installed close to the pick-up nozzle.
- Fast response is suitable for pick-up detection.
- Measures slight differences in flow rate which cannot be detected by pressure.
- Not affected by fluctuation in suction pressure, thanks to mass flow measurement.
- Clogged or crushed nozzle is detectable by analog output.
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