Mass Flow Sensor Model MCS100 | Mass Flow Meters, Mass Flow Sensors

The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.

The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.

Products Introduction Video

Measuring Mass Flow Rate

Can measure mass flow rate according to the standard condition (20℃, 1 atm) of gas without temperature nor pressure compensation.

Compact and Lightweight

Small and light weight which can be installed wherever, it’s suited for a variety of flow measurements in such as laboratory and various industry applications. (33.5 x 10.5 x 17.0 mm, just 9g, without cable)

Fast response time : 5ms

Detects even slight changes in the flow rate. Suitable for fast takt time applications.

Bidirectional flow range

Detect the direction in which the gas flows. Suitable for instrumentation where the flow direction changes.

Low power consumption: 12mA max. at 24Vdc

Suitable for battery-driven use on handheld devices

Free mounting position and not required straight piping length

Suitable for a variety of flow measurements in areas such as laboratory and various industry applications

Measurement flow range line-up

One-way flow range

MCS100A104 : 0 to 3L/min

MCS100A112 : 0 to+500mL/min

MCS100A116 : 0 to 5L/min

MCS100A120 : 0 to 10L/min

Bidirectional flow range

MCS100A100 : -3 to +3 L/min

MCS100A108 : -500 to +500mL/min

MCS100A128 : -10 to +10L/min

Construction specification

Material
Parts contacted to gas : PPS resin, Ceramic (printed wiring board), Brass (piping connection) Cover : PC resin
Piping connection : M5 female (brass insertion)
Operating temperature range : 0 to 50℃
Operating pressure range : -70 to 200kPa
Pressure resistance : 300kPa

Accessories

Multi channel indicator model MCW401

Designed for remotely display unit with up to 4pcs MCS100.

It also produces open collector switch output.
Additionally, by means of RS-232C communication, PC or PLC can be used to set parameter and to view instantaneous flow value and switch status of each channel. 4 types of “Window comparator mode” suitable for pick-up & placing applications and “Hysteresis mode” suitable for general flow monitoring, as switching operation.