Measuring Sensors

High-Accuracy Position Sensors

Model No.
K1G
K1G

Performance and functions far exceed conventional norms, allowing you to make the measurements you want.

  • Film meander measurement
  • Film sheet thickness measurement
  • Wafer alignment

Catalogs

4 items
[Catalog / Chinese (Simplified)] High-Accuracy Position Sensors（Chinese (Simplified)）
Document No
CP-PC-2265C
Model No.
K1G
[Catalog / English] High-Accuracy Position Sensors
Document No
CP-PC-2265E
Model No.
K1G
[Catalog / English] Helps improv accuracy of wafer eccentricity measurement
Document No
CP-PC-9000-003E
Model No.
K1G
[Catalog / English] Accurate determination of wafer position in vacuum chamber
Document No
CP-PC-9010-005E
Model No.
K1G

User's Manuals

19 items
[Manual / English] High-Accuracy Position Sensor Model K1G User’s Manual for EtherCAT Communication (SDO Communication-Supported Model)
Document No
CP-SP-1483E
Model No.
K1G-C04E，K1G-C04EG
[Manual / Japanese / English] Handling Precautions for K1G-C04E / K1G-C04EG High-Accuracy Position Sensor Controller
Document No
CP-UM-5916JE
Model No.
K1G
[Manual / Japanese / English] Handling Precautions for Protective Sticker model SZ-D03 for Sensor Heads model K1G-S07
Document No
CP-UM-5940JE
Model No.
SZ-D03
[Manual / Japanese / English] K1G-C04E / K1G-C04EG High-Accuracy Position Sensor Controller User's Manual
Document No
CP-UM-5910JE
Model No.
K1G
[Manual / Chinese (Simplified)] Model K1G High-Accuracy Position Sensors User's Manual（Chinese (Simplified)）
Document No
CP-SP-1385C
Model No.
K1G
[Manual / English] Model K1G High-Accuracy Position Sensors User's Manual
Document No
CP-SP-1385E
Model No.
K1G
[Manual / Chinese (Simplified)] Model K1G High-Accuracy Position Measurement Sensor MECHATROLINK-III Communication Manual（Chinese (Simplified)）
Document No
CP-SP-1386C
Model No.
K1G
[Manual / English] Model K1G High-Accuracy Position Measurement Sensor MECHATROLINK-III Communication Manual
Document No
CP-SP-1386E
Model No.
K1G
[Manual / Chinese (Simplified)] Model K1G High-Accuracy Position Sensor Global Model User's Manual
Document No
CP-SP-1397C
Model No.
K1G

Software download

Model K1G [ESI File for K1G-C04E(G)]
Model K1G [ESI File for K1G-C04E(G)-001]

CAD data

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