Using a proprietary optical system, these sensors detect liquid leakage as well as the surface level of pure water or chemicals used for heat treatment, washing, or exposure processes in the manufacturing of semiconductors and liquid crystals. In addition to providing reliable detection, they save space and help to support fail-safe systems.
The optics and housing of the sensor for detecting very small parts like LEDs and of the sensor with a very narrow light beam for wafer mapping are specially designed for these applications. They not only feature a high level of detection performance, but also save space, reduce adjustment workload, and are easy to maintain.
These optical fiber sensors are specialized for uses such as the detection of leakage or surface level of chemicals and pure water used in semiconductor and LCD manufacturing processes, detection during wafer mapping, and detection of the dropping of an LED or other very small part.
Equipment becomes smaller and smaller, but there is probably room to install this approx. 10 mm-thick switch. The easily detachable switch head enables quick restart of equipment after a leak has occurred.
Products Introduction Video Model HPQ-D_ _
Features
- Maintenance-free optical liquid leakage detection switch
Reliably detects liquids by ensuring sufficient gain between Light-ON and Dark-ON light levels.
Sensitivity adjustment is not required. Can be used immediately after installation. - Acids or alkaline liquids, IPA (isopropyl alcohol), pure water, Fluorinert, Galden, etc.
Note: For explosion-proof applications, be sure to select a suitable fiber type.
Fluorinert and Galden are registered trademarks of 3M and Solvay Solexis respectively. - PFA protection for switch and cable
PVC bracket is available for acid/alkali detection, and PFA (with some SUS) for organic solvent detection. - Easy maintenance
the detector surface—a much easier process than with detection tape or a liquid-absorbing model. - Operation indicator
The operation status is indicated by the LED on the switch. It is green normally and orange if a problem occurs.
Lineup
| Model | Features |
|---|---|
| HPQ-D11 | N.C., NPN, PVC bracket |
| HPQ-D12 | N.C., PNP, PVC bracket |
| HPQ-D21 | N.C., NPN, PFA bracket |
| HPQ-D13 | N.O., NPN, PVC bracket |
| HPQ-D23 | N.O., NPN, PFA bracket |
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