Micro Flow Rate Liquid Flow Meter

Micro Flow Rate Liquid Flow Meter Model F7M

Model No.
F7M
F7M-05

A thermal micro flow rate liquid flowmeter that incorporates a thermal MEMS sensor and a highly corrosion-resistant quartz glass flow path

  • Measures micro flow rates of several mL/min
  • Compact, light-weight, and easy to install
  • Flexible installation and wide range of fluids
  • Straight flow path

Catalogs

3 items
[Catalog / Chinese (Simplified)] Micro Flow Rate Liquid Flow Meter
Document No
CP-PC-1593C
Model No.
F7M
[Catalog / English] Micro Flow Rate Liquid Flow Meter
Document No
CP-PC-1593E
Model No.
F7M
[Catalog / English] Equipment and Application Overview -Wafer Cleaning Equipment-
Document No
CP-PC-9000E
Model No.
無し 

User's Manuals

4 items
[Manual / Chinese (Simplified)] Micro Flow Rate Liquid Flow Meter Model F7M User's Manual (Chinese (Simplified))
Document No
CP-SP-1421C
Model No.
F7M
[Manual / English] Micro Flow Rate Liquid Flow Meter Model F7M User's Manual
Document No
CP-SP-1421E
Model No.
F7M
[Manual / German] Micro Flow Rate Liquid Flow Meter Model F7M User's Manual (German)
Document No
CP-SP-1421G
Model No.
F7M
[Manual / English] User's Manual for Smart Loader Package Model SLP-F7M for Micro Flow Rate Liquid Flow Meter Model F7M
Document No
CP-SP-1423E
Model No.
SLP-F7MJ91

White Paper

What you need to know about Micro Flow Measurement Today

Loader Packages, Drivers

Compact Liquid Flowmeters

Model F7M Micro Flow Rate Liquid Flowmeter
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