Factory and plant Control products Case

【 半導体製造 / 洗浄機 】低濃度洗浄液に対応。高精度な微小液体流量計(前工程全般・枚葉洗浄装置)

こんなお悩みありませんか?

 

洗浄液計測のお悩み

過酸化水素は気泡が多く、再現性の高い計測ができない。

洗浄液の低濃度化が進み、使用する薬液量の計測が難しい。

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過酸化水素水のお悩み
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過酸化水素水のお悩み
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過酸化水素水のお悩み

洗浄液で使用する 薬液量が少なくなり

僅かな液体の流量計測が必要。

洗浄液は気泡が発生しやすい液体が多く、

安定した計測が難しい。

従来の流量計は検出器と変換器に

分かれており、設置が大変

 

アズビルの微小液体流量計なら

メリット①

数mL/minの液体流量を計測できる

アズビルで実績のあるMEMSセンシング技術を活用した、熱式計測原理を採用しました。

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過酸化水素水のお悩み
メリット②

気泡の影響を受けにくい計測方式を採用

アズビルが採用した熱式は、超音波式と比較し、液体中の気泡の影響を受けにくく、安定した計測が可能です。

また、ストレート流路を採用し、気泡が抜けやすい構造にしました。

 

\ その他にもいろいろなメリットがあります ! /

 

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DLバナー
cp-pc-9000-008
Document language
日本語
File format
PDF

資料番号: CP-PC-9000-008

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Azbil Corporation Advanced Automation Company Privacy Policy

Azbil Corporation (hereinafter referred to as "the Company") Advanced Automation Company (hereinafter referred to as “AAC") collects and receives personal information from customers and business partners (hereinafter referred to as "Customers") in the course of its business activities. We will handle this personal information appropriately in compliance with the laws and regulations regarding personal information protection, as well as in accordance with the following provisions. We also comply with Azbil Privacy Policy for the Protection of Personal Information.

1.Purpose of Use of Personal Information

Except for cases stipulated by laws and regulations, AAC uses the personal information collected and provided by Customers for the following purposes. 

  1. Company name: Azbil Corporation

    For more information about the Company, please refer to the link for the “Management and Board Directors” and “Company Overview”.

  2. Privacy Information Protection Manager: Azbil Corporation, Advanced Automation Company

    General Manager, CX Promotion Department, Business Development Group

    Contact: Please see “3. Disclosure, Correction, Deletion, etc. of Personal Information” below.

  3. The types and purposes of use of personal information collected and provided by Customers are as follows.

    <Types of Personal Information Collected and Provided by Customers, etc.>

  • Name
  • Address (individual's address or corporate address), postal code
  • Company (corporation, association, organization) name, office name, department affiliation
  • Job title, employee classification, qualifications, and other employment-related information
  • Phone number, fax number, extension number, email address, and other methods of contact preferred by Customers
  • Purchase history of products and goods
  • Videos, images, or audio related to individuals, and other signals, etc.

  <Purposes of Using Personal Information Collected and Provided by Customers, etc.>

  • Providing information related to the azbil Group and azbil Group products and services (including company brochures, catalogs, PR magazines, etc.) via mail, email newsletters, fax, telephone, and other means.
  • Providing support related to azbil Group products and services.
  • Planning, research, and development of azbil Group products and services.
  • Providing information on exhibitions, events, seminars, campaigns, surveys, gifts, etc., hosted or participated in by the azbil Group.
  • Recording of videos, images, and audio at exhibitions, events, seminars, etc.
  • Research and marketing activities related to the usage status and usage environment of azbil Group products and services.
  • Providing information about products and services from partner companies, etc.
  • The purposes explicitly stated when acquiring personal information.
  • Conducting business discussions and meetings and maintaining communication.
  • Providing information and contact with the person in charge.
  • Management of entry and exit to our company’s facilities.
  • Providing information through sales activities when we deem that azbil Group products and services are useful for Customers, etc.
  • Responding to, Customer’s inquiries and requests, etc.
  • Operations related to the above matters.

 

2. Joint Use of personal information

Personal information collected and provided by customers will be shared within the following scope.

  1. Items of personal information to be shared

    Each item listed in the above <Type of Personal Information Collected and Provided by Customers, etc.>

  2. Purpose of Joint Use

    As stated in the above <Purpose of Using of Personal Information Collected and Provided by Customers, etc.>

    * Please note that responses to Customer’s inquiries and requests may be handled by affiliated companies in or near the Customer's location.

  3. Scope of joint users

    Affiliates of the azbil Group

  4. Name of the person responsible for the management of Joint Use of the Personal Information

    Azbil Corporation, Advanced Automation Company
    General Manager, CX Promotion Department, Business Development Group

  5. Company name, address, and name of representative

    Company name: Azbil Corporation
    For more information about the Company, please refer to the link for the “Management and Board Directors” and “Company Overview

     

3. Disclosure, Correction, Deletion, etc. of Personal Information

  1. We will not retain your personal information for longer than is necessary to achieve the above-mentioned purposes of use. When the use of personal information is no longer necessary for the purposes of use, we will promptly delete your personal information.
     
  2. We will promptly respond to requests from the Customers for disclosure, correction, addition or deletion of personal information, or withdrawal of consent provided by the Customer or their agent on the Website. For requests under this paragraph 3, please contact us via the following.

    Contact Form
          
     <Contact for personal information>
    Azbil Corporation, Advanced Automation Company, Business Development Group
    Digital Marketing Group, CX Promotion Department, Fujisawa Technology Center

Requests for disclosure, etc. require procedures such as identification. We will send the requester the documents necessary for the application. Please note that we cannot accept requests that are made in person at our company. If we are unable to comply with a request for disclosure, etc., we will notify you, with the reason.

4. Revision of this Privacy Policy

We may change or modify this Privacy Policy from time to time. Any changes we make to this Privacy Policy will be posted on our Privacy Policy website along with the date of revision.

 

Created on July 12, 2023

Revised on Aug 01, 2025