Mass Flow Controllers

Compact Digital Mass Flow Controller
Model F4H

Model No.
F4H
F4H

This device is a high-performance compact digital mass flow controller with advanced functions for equipments.
It features high speed and wide range flow rate control and 1%SP accuracy. With isolation of the power supply from the signal circuit, power supply noise can’t affect analog signals.
It realize the high noise tolerance.

Catalogs

2 items
[Catalog / English] Compact Digital Mass Flow Controller
Document No
CP-PC-1590E
Model No.
F4H
[Catalog / English] Instrumentation for sputtering system
Document No
CP-PC-9010-007E
Model No.
F4H

Specification Sheets

1 items
[Spec Sheet / English] Compact Digital Mass Flow Controller Model F4H
Document No
CP-SS-1959E
Model No.
F4H

User's Manuals

5 items
[Manual / Japanese / English / Chinese (Simplified) / Korean] Compact Digital Mass Flow Controller Model F4H9050 / 9200 / 9500 / 0002 / 0005 / 0020 User's Manual
Document No
CP-UM-5905JECK
Model No.
F4H
[Manual / Japanese / English] Compact Digital Mass Flow Controller Semi-Standard Gas Models User's Manual
Document No
CP-UM-5906JE
Model No.
F4H
[Manual / English] Compact Digital Mass Flow Controller Model F4H9050 / 9200 / 9500 / 0002 / 0005 / 0020 User's Manual for Installation and Configuration
Document No
CP-SP-1405E
Model No.
F4H9050, 9200, 9500, 0002, 0005, 0020
[Manual / English] Model F4H Compact Digital Mass Flow Controller User's Manual for RS-485 Communication Functions
Document No
CP-SP-1408E
Model No.
F4H9050, 9200, 9500, 0002, 0005, 0020
[Manual / English] User's Manual for Loader Package Model MLP300A000 for Compact Digital Mass Flow Controller Model F4H9050 / 9200 / 9500 / 0002 / 0005 / 0020
Document No
CP-SP-1415E
Model No.
MLP

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Mass Flow Controller

Compact Digital Mass Flow Controller Model F4H
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